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High-precision Z stage - List of Manufacturers, Suppliers, Companies and Products

High-precision Z stage Product List

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High-precision Z stage 'L-310'

Precision positioning for industrial and research fields! High duty cycle Z-stage.

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

  • encoder

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[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment

We offer a diverse lineup of mechanisms, sizes, and strokes to meet customer needs. We also accommodate modifications and custom orders.

This is a feature on the Z stage of Kozu Seiki's precision positioning stages, which are active in various production sites such as semiconductor manufacturing equipment. We introduce the upright Z stage and three types of horizontal Z stages. Each stage includes information on table size and model type, as well as essential specifications for selecting a Z stage, such as stroke, overall height, and load capacity. Examples of performance values are also provided. Custom case studies are included as well. This material serves as a helpful resource for selection. Performance values for the Z stage are also available. *For more details, please refer to the PDF document or feel free to contact us.

  • Other semiconductor manufacturing equipment

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