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High-precision Z stage Product List

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High-precision Z stage L-306 compatible with compact design and multi-axis system construction.

High-precision Z stage L-306 compatible with compact design and multi-axis system construction.

Compact high-precision Z stage with a 13mm stroke.

The L-306 is a Z-stage that achieves high-precision positioning despite its compact design. It features a return drive structure using belt gears, resulting in a compact size (installation area of 63×63mm). It is easy to combine with an XY stage. The drive system employs either a 2-phase stepping motor or a closed-loop DC motor, allowing configurations tailored to specific applications and control systems. Additionally, it uses cross roller guides, providing high rigidity, reduced friction due to low preloading, and smooth operation. Furthermore, it boasts high guiding accuracy and load-bearing performance. The forced-holding rolling element cage prevents cage creep.

  • csm_L-306.01xxxx-Drawing.eps_Bilder-Web_e408c2dab2.jpg
  • Actuator
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  • High-precision Z stage

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High-precision Z stage 'L-310'

High-precision Z stage 'L-310'

Precision positioning for industrial and research fields! High duty cycle Z-stage.

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

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[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment

[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment

We offer a diverse lineup of mechanisms, sizes, and strokes to meet customer needs. We also accommodate modifications and custom orders.

This is a feature on the Z stage of Kozu Seiki's precision positioning stages, which are active in various production sites such as semiconductor manufacturing equipment. We introduce the upright Z stage and three types of horizontal Z stages. Each stage includes information on table size and model type, as well as essential specifications for selecting a Z stage, such as stroke, overall height, and load capacity. Examples of performance values are also provided. Custom case studies are included as well. This material serves as a helpful resource for selection. Performance values for the Z stage are also available. *For more details, please refer to the PDF document or feel free to contact us.

  • Other semiconductor manufacturing equipment
  • High-precision Z stage

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High Rigidity and High Precision Z Stage for Semiconductor Inspection V-Z03

High Rigidity and High Precision Z Stage for Semiconductor Inspection V-Z03

Improving the quality and efficiency of semiconductor inspection with high-speed, high-precision Z-axis control.

In the semiconductor field, high precision and stability are required for the positioning of wafers and masks. Especially in inspection processes and microfabrication, even slight positional deviations can lead to measurement errors and reduced yield, significantly impacting product quality. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed response and high-precision Z-axis control. Furthermore, with a high-rigidity cross roller guide and a non-contact linear encoder, it ensures stable positioning without backlash and high reproducibility. It is also optimal for precise positioning of heavy objects, supporting loads of up to 150 N and featuring a pneumatic counterbalance. 【Application Scenarios】 - Semiconductor inspection equipment - Wafer inspection and measurement equipment - Precision measurement instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced takt time due to high-speed response - Stable operation due to high-rigidity guides - Expanded applications due to high load capacity - Enhanced safety through self-locking functionality

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High-Precision Z Stage L-310 for Optical Adjustment and Optical Alignment

High-Precision Z Stage L-310 for Optical Adjustment and Optical Alignment

For optical alignment and focus adjustment. Precision Z stage featuring high-rigidity cross roller guides.

In optical devices, misalignment of lenses and sensors significantly affects optical performance. Particularly in optical axis adjustment and focus control, stable positioning at the sub-micron level is required. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, high-precision position measurement using an incremental encoder enables precise Z-axis position control in optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Optical alignment devices - Sensor position adjustment - Microscope focus control - Position adjustment of laser optical systems 【Benefits of Implementation】 - Improved optical performance through high-precision Z-axis positioning - Enhanced measurement accuracy due to stable operation - Increased work efficiency through smooth position adjustment - Improved yield due to enhanced stability of the equipment

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High-Precision Z Stage L-310 for Research and Development

High-Precision Z Stage L-310 for Research and Development

For positioning the Z-axis in microscopy, optical experiments, and precision measurements. A precision Z-stage featuring a high-rigidity cross roller guide.

In experimental research and development, positioning accuracy at the nano to micron level affects the reliability and reproducibility of experimental results. Particularly in fields such as microscopic observation, optical experiments, and material evaluation, stable precision positioning in the Z direction is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, it achieves stable Z-axis position control for research and development applications through high-precision position measurement using an incremental encoder. 【Application Scenes】 - Microscopic observation devices - Precision measurement devices - Material testing devices - Optical experiment devices - Experimental devices for research and development 【Benefits of Implementation】 - Improved experimental accuracy through high-precision Z-axis positioning - Enhanced reproducibility of experimental data due to stable operation - Easier fine adjustments due to smooth operation - High reliability for research applications You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

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High-Precision Z Stage L-310 for Precision Measurement Devices, Load Capacity 10 kg

High-Precision Z Stage L-310 for Precision Measurement Devices, Load Capacity 10 kg

Adopts high-rigidity cross roller guide. Ideal for Z-axis positioning in precision measurement and research applications.

In precision measurement and analysis devices, even slight positional shifts in the Z direction can significantly impact measurement accuracy and reproducibility. This is especially true for measurements of fine structures and nanoscale analyses, where a high-precision and stable positioning mechanism is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. It achieves high guide accuracy and rigidity, enabling stable Z-direction positioning in precision measurement devices and research applications. 【Usage Scenarios】 - Precision measurement instruments - Inspection devices - Research and development 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Increased reliability due to stable operation - Enhanced work efficiency through smooth operation For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

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